Differences

This shows you the differences between two versions of the page.

--- installation_fp_sci [2023/02/17 20:14]
pereira [Pumpdown of FP Chamber]
+++ installation_fp_sci [2023/02/17 20:16]
pereira [Pumpdown of FP Chamber]
@@ Line 44: / Line 44: @@
   - If the TMP is still on (this could be the case for a short vent period), turn it off and close the foreline valve (FV) before doing step 6.
   - When the BPG reads below 200 mTorr, **Close** RV and **Open** FV. Turn the TMP on if it is not already. When the TMP is “at speed” **Open** the TGV.
-  - NOTE: before reach "at speed", pressure in the chamber, as read by BPG, might increase to a point where TGV can not be open. If that is the case, repeat
+  - NOTE: before reach "at speed", pressure in the chamber, as read by BPG, might increase to a point where TGV can not be open. If that is the case, turn off the turbo pump, close FV, and repeat the sequence from step 6 until pressure goes below 100 mTorr. Then continue
   - If the TMP was off before opening the TGV, the chamber pressure may have risen to a point where the TGV closes automatically. If the BPG still reads < 1 Torr, attempt to **Open** the TGV again.
   - Allow the TMP to pump on the system until the IG reads < 1E-5 Torr.

S800 Documentation