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installation_fp_sci [2023/02/17 20:16] pereira [Pumpdown of FP Chamber] |
installation_fp_sci [2023/02/17 20:18] pereira [Pumpdown of FP Chamber] |
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- If the TMP is still on (this could be the case for a short vent period), turn it off and close the foreline valve (FV) before doing step 6. | - If the TMP is still on (this could be the case for a short vent period), turn it off and close the foreline valve (FV) before doing step 6. | ||
- When the BPG reads below 200 mTorr, **Close** RV and **Open** FV. Turn the TMP on if it is not already. When the TMP is “at speed” **Open** the TGV. | - When the BPG reads below 200 mTorr, **Close** RV and **Open** FV. Turn the TMP on if it is not already. When the TMP is “at speed” **Open** the TGV. | ||
- | - NOTE: before reach "at speed", | + | - NOTE: before reach "at speed", |
- | - If the TMP was off before opening the TGV, the chamber pressure may have risen to a point where the TGV closes automatically. If the BPG still reads < 1 Torr, attempt to **Open** the TGV again. | + | |
- Allow the TMP to pump on the system until the IG reads < 1E-5 Torr. | - Allow the TMP to pump on the system until the IG reads < 1E-5 Torr. | ||
- On the “FP_State_Buttons” page click **RUN** to enter run mode. | - On the “FP_State_Buttons” page click **RUN** to enter run mode. |