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venting_pumping_intermediate_image_box [2017/06/12 14:55] pereira |
venting_pumping_intermediate_image_box [2017/06/13 11:43] pereira |
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* Open **S800Vac** and go to page 03 (" | * Open **S800Vac** and go to page 03 (" | ||
* Check box " | * Check box " | ||
- | {{: | + | {{: |
* In order to begin venting process, select that box and click "BEGIN VENTING PROCEDURE" | * In order to begin venting process, select that box and click "BEGIN VENTING PROCEDURE" | ||
* Box "VENT STATUS" | * Box "VENT STATUS" | ||
- | * Turbo gate valve **I214GV** will be automatically closed and pressure in chamber will start rising (as seen in **I215PG**) {{: | + | * Turbo gate valve **I214GV** will be automatically closed and pressure in chamber will start rising (as seen in **I215PG**) {{: |
- | * When **I215PG** reads atmospheric pressure, select the box "VENT STATUS" | + | * When **I215PG** reads atmospheric pressure, select the box "VENT STATUS" |
* The status in the box "VENT STATUS" | * The status in the box "VENT STATUS" | ||
* You can now open the chamber | * You can now open the chamber | ||