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venting_pumping_intermediate_image_box [2017/06/13 12:57] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2017/06/13 12:58] pereira [Pumping Intermediate-image chamber] |
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* Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | * Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | ||
* Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | * Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | ||
- | * IMPORTANT: Close manual roughing pump valve close to the Intermediate-image chamber | + | * IMPORTANT: Close manual roughing pump valve (close to the Intermediate-image chamber) |
* Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | * Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | ||
* Open **S800Vac** and go to page 03 (" | * Open **S800Vac** and go to page 03 (" | ||
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* When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
* NOTE: WHAT TO DO IF PUMPDOWN TIMER EXPIRES BEFORE TURBO PUMP IS ON | * NOTE: WHAT TO DO IF PUMPDOWN TIMER EXPIRES BEFORE TURBO PUMP IS ON | ||
+ | * At the end of the procedure, close the manual roughing pump valve | ||