venting_pumping_intermediate_image_box
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| Both sides previous revision Previous revision Next revision | Previous revision Next revision Both sides next revision | ||
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venting_pumping_intermediate_image_box [2017/06/13 12:57] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2017/06/13 15:40] pereira [Pumping Intermediate-image chamber] |
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| * Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | * Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | ||
| * Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | * Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | ||
| - | * IMPORTANT: Close manual roughing pump valve close to the Intermediate-image chamber | + | * IMPORTANT: Close manual roughing pump valve (close to the Intermediate-image chamber) {{: |
| * Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | * Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | ||
| * Open **S800Vac** and go to page 03 (" | * Open **S800Vac** and go to page 03 (" | ||
| Line 56: | Line 57: | ||
| * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
| * NOTE: WHAT TO DO IF PUMPDOWN TIMER EXPIRES BEFORE TURBO PUMP IS ON | * NOTE: WHAT TO DO IF PUMPDOWN TIMER EXPIRES BEFORE TURBO PUMP IS ON | ||
| + | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt · Last modified: 2024/01/12 09:37 by noji
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