venting_pumping_intermediate_image_box
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| Both sides previous revision Previous revision Next revision | Previous revision Next revision Both sides next revision | ||
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venting_pumping_intermediate_image_box [2018/04/16 16:13] pereira |
venting_pumping_intermediate_image_box [2018/04/25 17:04] pereira [Pumping Intermediate-image chamber] |
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| * Check box " | * Check box " | ||
| {{: | {{: | ||
| - | * In order to begin venting process, select | + | * In order to begin venting process, select box "VENT STATUS" |
| * Box "VENT STATUS" | * Box "VENT STATUS" | ||
| * Turbo gate valve **I214GV** will be automatically closed and pressure in chamber will start rising (as seen in **I215PG**) {{: | * Turbo gate valve **I214GV** will be automatically closed and pressure in chamber will start rising (as seen in **I215PG**) {{: | ||
| Line 41: | Line 41: | ||
| * Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | * Verify that Chamber is closed and pressure-relief valve (north side of the chamber) is properly closed (NOTE: sometimes, due to overpressure from dry N2 during the venting procedure, the O-ring in pressure-relief valve flange is moved out of place) | ||
| * Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | * Verify that PPACs are not biased by opening the [[HV bias|HV GUI]] | ||
| - | * IMPORTANT: | + | * IMPORTANT: |
| * Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | * Insert PPACs/turn on light (Diagnostic Drives PanelMate) and verify condition through sight window on south side of the chamber (be careful no to bump the bullet camera). | ||
| Line 56: | Line 56: | ||
| * **I214GV** will be opened | * **I214GV** will be opened | ||
| * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
| - | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr). In this case the foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. | + | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this case the foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. |
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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