venting_pumping_intermediate_image_box
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venting_pumping_intermediate_image_box [2018/04/25 17:03] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2018/04/25 17:04] pereira [Pumping Intermediate-image chamber] |
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| * **I214GV** will be opened | * **I214GV** will be opened | ||
| * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
| - | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr). In this case the foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. | + | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this case the foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. |
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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