venting_pumping_intermediate_image_box
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venting_pumping_intermediate_image_box [2018/04/25 17:12] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2018/04/25 17:12] pereira [Pumping Intermediate-image chamber] |
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| * the foreline valve **I214GV** will be closed, and the corresponding PanelMate box will turn red and display an error message " | * the foreline valve **I214GV** will be closed, and the corresponding PanelMate box will turn red and display an error message " | ||
| * the foreline pressure will be few Torr | * the foreline pressure will be few Torr | ||
| - | In a situation like this, foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. | + | |
| When the TP is at speed and **I214GV** automatically opens, you can remove the bypass of the foreline valve | When the TP is at speed and **I214GV** automatically opens, you can remove the bypass of the foreline valve | ||
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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