venting_pumping_intermediate_image_box
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venting_pumping_intermediate_image_box [2018/12/19 11:07] pereira [Venting/pumping Intermediate Image box and filling PPACs with gas] |
venting_pumping_intermediate_image_box [2018/12/19 11:07] pereira [Pumping Intermediate-image chamber] |
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| * (Note: sometimes it is necessary to repeat this operation a couple of times). | * (Note: sometimes it is necessary to repeat this operation a couple of times). | ||
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
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| + | ===== Filling Intermediate-image delay PPAC ===== | ||
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venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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