venting_pumping_intermediate_image_box
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| Both sides previous revision Previous revision | Next revision Both sides next revision | ||
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venting_pumping_intermediate_image_box [2024/01/11 10:36] noji [Venting the Chamber] |
venting_pumping_intermediate_image_box [2024/01/11 10:37] noji [Venting the Chamber] |
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| To vent the chamber: | To vent the chamber: | ||
| - | - Put the GHS in vent mode by clicking **VENT**, | + | - Put the GHS in vent mode by clicking **VENT** |
| - monitor **RBT_BTS32: | - monitor **RBT_BTS32: | ||
| - close **RV**, the valve to the roughing pump, and | - close **RV**, the valve to the roughing pump, and | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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