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venting_pumping_intermediate_image_box [2024/01/11 10:37] noji [Venting the Chamber] |
venting_pumping_intermediate_image_box [2024/01/11 11:01] noji [Venting the Chamber] |
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- monitor **RBT_BTS32: | - monitor **RBT_BTS32: | ||
- close **RV**, the valve to the roughing pump, and | - close **RV**, the valve to the roughing pump, and | ||
- | - open **Vent**. | + | - open **Vent** |
The PPAC pressure S800_GHS: | The PPAC pressure S800_GHS: | ||
- | RBT_BTS32: | + | RBT_BTS32: |
===== Evacuating the Chamber ===== | ===== Evacuating the Chamber ===== | ||