venting_pumping_intermediate_image_box
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| Both sides previous revision Previous revision | Next revision Both sides next revision | ||
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venting_pumping_intermediate_image_box [2024/01/11 12:39] noji [Evacuating the Chamber] |
venting_pumping_intermediate_image_box [2024/01/11 14:51] noji [Venting the Chamber] |
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| - Put the GHS in vent mode by clicking **VENT** (valves #5 and #6 are open), | - Put the GHS in vent mode by clicking **VENT** (valves #5 and #6 are open), | ||
| - monitor **RBT_BTS32: | - monitor **RBT_BTS32: | ||
| - | - close **RV**, the valve to the roughing pump, and | + | - ensure that **RV**, the valve to the roughing pump, is closed, and |
| - open **Vent** valve to start venting. | - open **Vent** valve to start venting. | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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