User Tools

Site Tools


venting_pumping_object_box

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revision Previous revision
Next revision
Previous revision
Next revision Both sides next revision
venting_pumping_object_box [2023/05/30 14:31]
swartzj
venting_pumping_object_box [2023/06/01 13:43]
swartzj
Line 6: Line 6:
   * Before you start, make sure that the gate valves named D2341 BGV and D2303 BGV are closed and that the IG is off.    * Before you start, make sure that the gate valves named D2341 BGV and D2303 BGV are closed and that the IG is off. 
   * The vent valve should also be closed when you begin.    * The vent valve should also be closed when you begin. 
-  * Both valves to the turbo pump should be closed and the turbo pump should be switched off. +  * The valve to the turbo pump TVG should be closed. If the chamber will be vented for a long time, Valve FV should also be closed and the turbo pump should be switched off . 
  
 The procedure is then as follows:  The procedure is then as follows: 
   - Close the valve to the roughing pump RV.    - Close the valve to the roughing pump RV. 
   - Now you can plot the pressure at BPG to monitor the pressure before you open the vent valve.    - Now you can plot the pressure at BPG to monitor the pressure before you open the vent valve. 
-  - **Keep a constant eye on the pressure level** as it increases rapidly. Before it nears 800 torr, **it is imperative that you close the venting valve.** Failure to do this will result in over pressure since the chamber will continue to be filled with dry nitrogen.  +  - **Keep a constant eye on the pressure level** as it increases rapidly. When it approaches 800 torr, **it is imperative that you close the venting valve.** Failure to do so will result in over-pressure in the chamber since it will continue to be filled with dry nitrogen.  
   - You can now enter and open the chamber.    - You can now enter and open the chamber. 
  
venting_pumping_object_box.txt ยท Last modified: 2024/02/06 10:40 by noji