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venting_pumping_object_box [2023/06/01 15:50] swartzj |
venting_pumping_object_box [2023/06/02 17:14] swartzj |
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The procedure is then as follows: | The procedure is then as follows: | ||
- Close the valve to the roughing pump RV. | - Close the valve to the roughing pump RV. | ||
- | - Now you can plot the pressure at BPG to monitor the pressure before you open the vent valve. | + | - Now you can plot the pressure |
- **Keep a constant eye on the pressure level** as it increases rapidly. When it approaches 800 torr, **it is imperative that you close the venting valve.** Failure to do so will result in over-pressure in the chamber since it will continue to be filled with dry nitrogen. | - **Keep a constant eye on the pressure level** as it increases rapidly. When it approaches 800 torr, **it is imperative that you close the venting valve.** Failure to do so will result in over-pressure in the chamber since it will continue to be filled with dry nitrogen. | ||
- You can now enter and open the chamber. | - You can now enter and open the chamber. | ||
Line 19: | Line 19: | ||
* Make sure that the IG is off. | * Make sure that the IG is off. | ||
* When you start, you should have RV closed, FV open and the TGV valve, Vent valve, as well as the gate valves named D2341 BGV and D2303 BGV all closed. | * When you start, you should have RV closed, FV open and the TGV valve, Vent valve, as well as the gate valves named D2341 BGV and D2303 BGV all closed. | ||
- | * Close FV and open RV to start pumping down the object chamber with the roughing pump. You can make a plot of the pressure at BPG at this point. | + | * Close FV and open RV to start pumping down the object chamber with the roughing pump. You can make a plot of the pressure |
* Section D2337 will initially be red with vacuum status: 'Bad vacuum' | * Section D2337 will initially be red with vacuum status: 'Bad vacuum' | ||
* Wait until the vacuum reading at FPG to drops to below 200 mTorr before you can safely turn on the turbo pump. | * Wait until the vacuum reading at FPG to drops to below 200 mTorr before you can safely turn on the turbo pump. |