venting_pumping_intermediate_image_box
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venting_pumping_intermediate_image_box [2018/04/25 17:14] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2018/04/25 17:14] pereira [Pumping Intermediate-image chamber] |
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| * **I214GV** will be opened | * **I214GV** will be opened | ||
| * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
| - | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214GV** will be closed and the corresponding PanelMate box will turn red and display an error message " | + | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214GV** will be closed and the corresponding PanelMate box will turn red and display an error message " |
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt ยท Last modified: 2024/01/12 09:37 by noji
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