venting_pumping_intermediate_image_box
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| Both sides previous revision Previous revision Next revision | Previous revision Next revision Both sides next revision | ||
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venting_pumping_intermediate_image_box [2018/04/25 17:53] pereira [Pumping Intermediate-image chamber] |
venting_pumping_intermediate_image_box [2018/12/18 11:18] pereira [Vent Intermediate-image chamber] |
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| * Check that the detectors are unbiased by opening the [[HV bias|HV GUI]] | * Check that the detectors are unbiased by opening the [[HV bias|HV GUI]] | ||
| * Notify the system of the bias-off state by selecting the " | * Notify the system of the bias-off state by selecting the " | ||
| + | * Open **S800Vac** and go to page 03 (" | ||
| * Isolate chamber by closing gate valves **I212GV** and **I215GV** | * Isolate chamber by closing gate valves **I212GV** and **I215GV** | ||
| * [[Vacuum control|Turn off]] ion gauge **I213IG** | * [[Vacuum control|Turn off]] ion gauge **I213IG** | ||
| - | * Open **S800Vac** and go to page 03 (" | ||
| * Check box " | * Check box " | ||
| {{: | {{: | ||
| Line 56: | Line 56: | ||
| * **I214GV** will be opened | * **I214GV** will be opened | ||
| * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours. | ||
| - | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214GV** will be closed and the corresponding PanelMate box will turn red and display an error message " | + | * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214FV** will be closed and the corresponding PanelMate box will turn red and display an error message " |
| + | * Select box labeled " | ||
| + | * Select box labeled "TURBO PUMP INTERMEDIATE IMAGE BOX I214TP" | ||
| + | * Turbo pump will start ramping speed. When the TP reaches | ||
| + | * When foreline vacuum gets below 2 Torr, you can select " | ||
| + | * (Note: sometimes it is necessary to repeat this operation a couple of times). | ||
| * At the end of the procedure, close the manual roughing pump valve | * At the end of the procedure, close the manual roughing pump valve | ||
venting_pumping_intermediate_image_box.txt · Last modified: 2024/01/12 09:37 by noji
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