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venting_pumping_object_box [2018/04/25 17:28] pereira |
venting_pumping_object_box [2018/04/25 17:49] pereira [Vent Object chamber] |
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* In order to begin venting process, select box "VENT STATUS" | * In order to begin venting process, select box "VENT STATUS" | ||
- | * Box "VENT STATUS" | + | * Box "VENT STATUS" |
- | * Turbo gate valve **I214GV** will be automatically closed | + | * Turbo gate valve **I188GV** will be automatically closed |
- | * When **I215PG** reads atmospheric pressure, select the box "VENT STATUS" | + | * Vent valve **I190VV** will be automatically opened. However, the pressure in the chamber (ass seen in **I191PG** will not change because we need to open the manual venting valve |
- | + | * Go to the S800 OBJ station and slowly open the manual valve (see figure below). You can see the pressure rising in the Granville-Phillips 275 Mini-Convectron display. | |
- | * The status in the box "VENT STATUS" | + | * When **I191PG** reads atmospheric pressure select the box "VENT STATUS" |
+ | * The status in the box "VENT STATUS" | ||
+ | * Close the manual valve | ||
* You can now open the chamber | * You can now open the chamber | ||
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+ | ===== Pumping Object chamber ===== | ||
+ | Requirements: | ||
+ | * Verify that Chamber is closed and that manual roughing pump valve located near the intermediate-image chamber is closed (see picture above) | ||
+ | * Verify that OBJ SCI is not biased by checking the HV module in dU6 | ||
+ | * Open **S800Vac** and go to page 01 (" | ||
+ | * Check " | ||
+ | * When the pressure in **I191PG** is below 100 mTorr, the Turbo Pump will start automatically through the following sequence: | ||
+ | * **I190RV** will be closed | ||
+ | * **I190FV** will be opened | ||
+ | * **I188GV** will be opened | ||
+ | * When the pressure ready by **I191PG** is few mTorr, you can turn on the ion gauge **I188IG**. Good vacuum will take ~30 minutes. | ||
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