venting_pumping_object_box
Differences
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| Both sides previous revision Previous revision Next revision | Previous revision Next revision Both sides next revision | ||
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venting_pumping_object_box [2018/04/25 17:42] pereira [Vent Object chamber] |
venting_pumping_object_box [2020/04/01 21:32] pereira [Vent Object chamber] |
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| * [[Vacuum control|Turn off]] ion gauge **I188IG** | * [[Vacuum control|Turn off]] ion gauge **I188IG** | ||
| * Check box " | * Check box " | ||
| + | * Go to the S800 OBJ station and make sure that the manual valve (see figure below) is closed. | ||
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| {{: | {{: | ||
| * In order to begin venting process, select box "VENT STATUS" | * In order to begin venting process, select box "VENT STATUS" | ||
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| * Turbo gate valve **I188GV** will be automatically closed | * Turbo gate valve **I188GV** will be automatically closed | ||
| * Vent valve **I190VV** will be automatically opened. However, the pressure in the chamber (ass seen in **I191PG** will not change because we need to open the manual venting valve | * Vent valve **I190VV** will be automatically opened. However, the pressure in the chamber (ass seen in **I191PG** will not change because we need to open the manual venting valve | ||
| - | | + | |
| * When **I191PG** reads atmospheric pressure select the box "VENT STATUS" | * When **I191PG** reads atmospheric pressure select the box "VENT STATUS" | ||
| * The status in the box "VENT STATUS" | * The status in the box "VENT STATUS" | ||
| Line 22: | Line 24: | ||
| * You can now open the chamber | * You can now open the chamber | ||
| + | {{: | ||
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| + | ===== Pumping Object chamber ===== | ||
| + | Requirements: | ||
| + | * Verify that Chamber is closed and that manual roughing pump valve located near the intermediate-image chamber is closed (see picture above) | ||
| + | * Verify that OBJ SCI is not biased by checking the HV module in dU6 | ||
| + | * Open **S800Vac** and go to page 01 (" | ||
| + | * Check " | ||
| + | * When the pressure in **I191PG** is below 100 mTorr, the Turbo Pump will start automatically through the following sequence: | ||
| + | * **I190RV** will be closed | ||
| + | * **I190FV** will be opened | ||
| + | * **I188GV** will be opened | ||
| + | * When the pressure ready by **I191PG** is few mTorr, you can turn on the ion gauge **I188IG**. Good vacuum will take ~30 minutes. | ||
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venting_pumping_object_box.txt ยท Last modified: 2024/02/06 10:40 by noji
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