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venting_pumping_object_box [2018/04/25 17:44] pereira [Vent Object chamber] |
venting_pumping_object_box [2018/04/25 17:49] pereira [Vent Object chamber] |
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+ | ===== Pumping Object chamber ===== | ||
+ | Requirements: | ||
+ | * Verify that Chamber is closed and that manual roughing pump valve located near the intermediate-image chamber is closed (see picture above) | ||
+ | * Verify that OBJ SCI is not biased by checking the HV module in dU6 | ||
+ | * Open **S800Vac** and go to page 01 (" | ||
+ | * Check " | ||
+ | * When the pressure in **I191PG** is below 100 mTorr, the Turbo Pump will start automatically through the following sequence: | ||
+ | * **I190RV** will be closed | ||
+ | * **I190FV** will be opened | ||
+ | * **I188GV** will be opened | ||
+ | * When the pressure ready by **I191PG** is few mTorr, you can turn on the ion gauge **I188IG**. Good vacuum will take ~30 minutes. | ||
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