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venting_pumping_intermediate_image_box [2018/04/25 17:53]
pereira [Pumping Intermediate-image chamber]
venting_pumping_intermediate_image_box [2018/08/14 10:52] (current)
pereira [Pumping Intermediate-image chamber]
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         * **I214GV** will be opened         * **I214GV** will be opened
   * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours.   * When the pressure ready by **I215PG** is few mTorr, you can turn on the ion gauge **I213IG**. Good vacuum will take ~1-2 hours.
-  * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214GV** will be closed and the corresponding PanelMate box will turn red and display an error message "​Foreline pressure > 2 Torr", and (4) the foreline pressure will be few Torr. In a situation like this, foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted. When the TP is at speed (40000 RPMthe **I214GV** will open automatically (Note: sometimes it is necessary to repeat this operation a couple of times). ​When the TP is running fine and the system is stable (pressure in **I326PG** ~ mTorr), you can remove the bypass of the foreline valve+  * NOTE: it sometimes happens that the foreline pressure rises above the trip point for the Turbo Pump (e.g. if the pumpdown timer expires before pressure is below 300 mTorr, or there is too much back-up pressure from the chamber when the foreline valve opens). In this situation, you will see that: (1) the turbo pump will stop, (2) the turbo gate valve **I214GV** will be closed, (3) the foreline valve **I214FV** will be closed and the corresponding PanelMate box will turn red and display an error message "​Foreline pressure > 2 Torr", and (4) the foreline pressure will be few Torr. In a situation like this, foreline valve needs to be bypassed open (in PanelMate) and the TP needs to be restarted
 +          * Select box labeled "​FORELINE VLVE I214FV"​ and the click on "​BYBASS VAC INTERLOCKS OPEN" button 
 +          * Select box labeled "TURBO PUMP INTERMEDIATE IMAGE BOX I214TP"​ and  click "​START"​ 
 +          * Turbo pump will start ramping speed. When the TP reaches ​40000 RPMthe **I214GV** will open automatically
 +          * When foreline vacuum gets below 2 Torr, you can select "​FORELINE VLVE I214FV"​ and click "​REMOVE BYPASS"​ 
 +          * (Note: sometimes it is necessary to repeat this operation a couple of times). ​
   * At the end of the procedure, close the manual roughing pump valve    * At the end of the procedure, close the manual roughing pump valve 
  
venting_pumping_intermediate_image_box.1524693180.txt.gz · Last modified: 2018/04/25 17:53 by pereira