Venting/pumping lower-dipole section
Venting analysis-line lower-dipole section
In order to ensure that the beamline in the target area is properly aligned with respect to the beam axis, it is necessary to install a telescope in between the last two quadrupoles of the analysis line, as well as a “cross hair” plate in between the last quadrupole and the target chamber. Although the alignment of the telescope is done by lab staff (e.g. Dave Sanderson), the user is responsible for removing the gate valve I246GV separating the analysis line and the target area. This of course, requires that the lower-dipole section is properly vented. The venting process is generally done by the device physicist, following the steps:
Verify that the target area is vented.
Using the manual controllers in the middle level of the S3 vault (see figure above), ensure that the ion gauge I225IG is turned off. Open S800vac PanelMate.
Go to page 4 (“lower beamline dipoles vacuum system, section 16”)
Ensure that gate valves I246GV (between lower-dipole section and target area) and I215GV (between intermediate image area and the lower-dipole section) are closed.
Window “VENT STATUS” should be green and display “GOOD VACUUM”
Walk to the bottom level of the S3 vault, right downstream of the last two dipoles of the analysis line and verify that the manual vent valve is closed (see picture below).
In PanelMate S800vac (page 4), click on “VENT STATUS” and select “BEGIN VENTING PROCEDURE”. The I225GV turbo gate valve will be automatically closed (see figure below), and the automatic vent valve open. However, the venting process won't be complete until you open the manual valve.
Walk (again) to the bottom level of the S3 vault, right downstream of the last two dipoles of the analysis line. Locate the I226PG Pirani gauge and ensure that it reads few miliTorr.
Slowly open the manual valve (see picture below) and verify that the pressure read in I226PG raises slowly.
After the section is vented (atmospheric pressure) close the manual gate valve.
Pumping analysis-line lower-dipole section
Make sure that the manual gate valve is closed (see above).
Open PanelMate
S800vac and go to page 04. Make sure that the venting valve
I225VV is closed (see last step of the
venting process described above)
Select window PUMPDOWN STATUS SECTION 16-LOWER DIPOLES and click on button START PUMPDOWN. The PUMPDOWN STATUS and VENT STATUS windows should display “PUMPDOWN IN PROGRESS”
After the rough valve I225RV is automatically open, the mechanical pump will start pumping.
The pressures in the mechanical pump (from I224PG) and beam chamber (from I226PG) will jump momentarily to high pressure values. They should go down slowly after few seconds (otherwise, the chamber is not properly closed).
When pressure in the chamber (from I226PG) gets below 100 mTorr (few minuntes), I225RV will close. Foreline valve I225FV will open followed by the turbo gate valve I225GV.
Wait for few hours until vacuum is good. You can then turn on the ion gauge I225IG