venting_pumping_object_box
Venting/pumping Object box
Vent Object chamber
Requirements: PanelMate file S800Vac
Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
Verify that OBJ SCI is not biased:
Isolate chamber by closing gate valves I177GV and I190GV
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Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”
Go to the S800 OBJ station and make sure that the manual valve (see figure below) is closed.
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Pumping Object chamber
Requirements: PanelMate file S800Vac
Verify that Chamber is closed and that manual roughing pump valve located near the intermediate-image chamber is closed (see picture above)
Verify that OBJ SCI is not biased by checking the HV module in dU6
Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
Check “PUMPDOWN STATUS INTERMEDIATE BEAMLINE OBJECT BOX”; it should read “PUMPDOWN STOPPED”. Select that box and click on “START PUMPDOWN”.
When the pressure in I191PG is below 100 mTorr, the Turbo Pump will start automatically through the following sequence:
I190RV will be closed
I190FV will be opened
I188GV will be opened
When the pressure ready by I191PG is few mTorr, you can turn on the ion gauge I188IG. Good vacuum will take ~30 minutes.
venting_pumping_object_box.txt · Last modified: 2020/04/01 21:32 by pereira