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Venting/pumping Object box
Vent Object chamber
Requirements: PanelMate file S800Vac
Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
Verify that OBJ SCI is not biased:
Isolate chamber by closing gate valves I177GV and I190GV
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Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”
.