Requirements: PanelMate file S800Vac

• Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
• Verify that OBJ SCI is not biased:
  • Check that the detectors is unbiased in the HV module sitting in dU6
  • Notify the system of the bias-off state by selecting the “OBJ_SCI_HV CONFIRM” box and clicking “HV CONFIRM OFF”
• Isolate chamber by closing gate valves I177GV and I190GV
• Turn off ion gauge I188IG
• Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”

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• In order to begin venting process, select box “VENT STATUS” and click “BEGIN VENTING PROCEDURE”
  • Box “VENT STATUS” should change from “VENT PROCEDURE STOPPED” to “WAITING FOR VENT TIMER”.
  • Turbo gate valve I214GV will be automatically closed and pressure in chamber will start rising (as seen in I215PG) .
  • When I215PG reads atmospheric pressure, select the box “VENT STATUS” and click “STOP VENTING PROCESS”. .

• The status in the box “VENT STATUS” should change from “WAITING FOR VENT TIMER” to “VENT PROCEDURE STOPPED”
• You can now open the chamber