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Venting/pumping Object box
Vent Object chamber
Requirements: PanelMate file S800Vac
Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
Verify that OBJ SCI is not biased:
Isolate chamber by closing gate valves I177GV and I190GV
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Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”
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In order to begin venting process, select box “VENT STATUS” and click “BEGIN VENTING PROCEDURE”
Box “VENT STATUS” should change from “VENT PROCEDURE STOPPED” to “WAITING FOR VENT TIMER”, and then to “VENT VALVE OPEN”
Turbo gate valve I188GV will be automatically closed
Vent valve I190VV will be automatically opened. However, the pressure in the chamber (ass seen in I191PG will not change because we need to open the manual venting valve
Go to the S800 OBJ station and slowly open the manual valve (see figure below). You can see the pressure rising in the Granville-Phillips 275 Mini-Convectron display.
When I191PG reads atmospheric pressure select the box “VENT STATUS” and click “STOP VENTING PROCESS”
The status in the box “VENT STATUS” should display “VENT PROCEDURE STOPPED” and the vent valve I190VV should be automatically closed
Close the manual valve
You can now open the chamber