Requirements: PanelMate file S800Vac

• Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
• Verify that OBJ SCI is not biased:
  • Check that the detectors is unbiased in the HV module sitting in dU6
  • Notify the system of the bias-off state by selecting the “OBJ_SCI_HV CONFIRM” box and clicking “HV CONFIRM OFF”
• Isolate chamber by closing gate valves I177GV and I190GV
• Turn off ion gauge I188IG
• Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”

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• In order to begin venting process, select box “VENT STATUS” and click “BEGIN VENTING PROCEDURE”
  • Box “VENT STATUS” should change from “VENT PROCEDURE STOPPED” to “WAITING FOR VENT TIMER”, and then to “VENT VALVE OPEN”
  • Turbo gate valve I188GV will be automatically closed
  • Vent valve I190VV will be automatically opened. However, the pressure in the chamber (ass seen in I191PG will not change because we need to open the manual venting valve
  • Go to the S800 OBJ station and slowly open the manual valve (see figure below). You can see the pressure rising in the Granville-Phillips 275 Mini-Convectron display located on top of the OBJ box.
  • When I191PG reads atmospheric pressure select the box “VENT STATUS” and click “STOP VENTING PROCESS”
  • The status in the box “VENT STATUS” should display “VENT PROCEDURE STOPPED” and the vent valve I190VV should be automatically closed
  • Close the manual valve
  • You can now open the chamber

Requirements: PanelMate file S800Vac

• Verify that Chamber is closed and that manual roughing pump valve located near the intermediate-image chamber is closed (see picture above)
• Verify that OBJ SCI is not biased by checking the HV module in dU6
• Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
• Check “PUMPDOWN STATUS INTERMEDIATE BEAMLINE OBJECT BOX”; it should read “PUMPDOWN STOPPED”. Select that box and click on “START PUMPDOWN”.
• When the pressure in I191PG is below 100 mTorr, the Turbo Pump will start automatically through the following sequence:
  • I190RV will be closed
  • I190FV will be opened
  • I188GV will be opened
• When the pressure ready by I191PG is few mTorr, you can turn on the ion gauge I188IG. Good vacuum will take ~30 minutes.