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Venting/pumping Object box
Vent Object chamber
Requirements: PanelMate file S800Vac
Open S800Vac and go to page 01 (“Production Target Box Vacuum System sec 13”)
Verify that OBJ SCI is not biased:
Isolate chamber by closing gate valves I177GV and I190GV
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Check box “PUMPDOWN STATUS BEAMLINE OBJECT BOX”. It should read “Good vacuum”
Go to the S800 OBJ station and make sure that the manual valve (see figure below) is closed.
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Pumping Object chamber
From S800 Vacuum Main Page, go to Object chamber page. This will open the page in the figure below.
Make sure that the IG is off.
When you start, you should have RV closed, FV open and the TGV valve, Vent valve, as well as the gate valves named D2341 BGV and D2303 BGV all closed.
Close FV and open RV to start pumping down the object chamber with the roughing pump. You can make a plot of the pressure at BPG at this point.
Wait for the vacuum reading at BPG to drop to below 100 mTorr before you close RV and open FV.
The vacuum reading at FPG needs to drop to below 150 mTorr before you can safely turn on the turbo pump.
After turning on the turbo pump, wait for the inner circle of the pump symbol to turn green and the pump to reach 40 000 rpm before you open the valve at TGV.
When the pressure decreases to below 10-3 Torr, you should see the pressure bottom out on your BPG plot, you can turn on the IG and also plot its pressure over time.
Object chamber vacuum control page